Semiconductor devices having a three-dimensional stacked structure and methods of de-skewing data therein

ABSTRACT

A semiconductor memory device having a 3D stacked structure includes: a first semiconductor area with a stacked structure of a first layer having first data and a second layer having second data; a first line for delivering an access signal for accessing the first semiconductor area; and a second line for outputting the first and/or second data from the first semiconductor area, wherein access timings of accessing the first and second layers are controlled so that a first time delay from the delivery of the access signal to the first layer to the output of the first data is substantially identical to a second time delay from the delivery of the access signal to the second layer to the output of the second data, thereby compensating for skew according to an inter-layer timing delay and thus performing a normal operation. Accordingly, the advantage of high-integration according to a stacked structure can be maximized by satisfying data input/output within a predetermined standard.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application claims the benefit of Korean Patent Application No.10-2010-0047645, filed on May 20, 2010, in the Korean IntellectualProperty Office, the disclosure of which is incorporated herein in itsentirety by reference.

BACKGROUND

The inventive concept relates to methods of driving semiconductordevices and semiconductor devices having a three dimensional (3D)stacked structure.

As semiconductor devices, e.g., memory devices, have gradually becomehighly integrated, a regular two dimensional (2D) structure has almostreached the limits of high-integration. A project for implementing asemiconductor memory device having a 3D structure to overcome the limitsof this 2D structure has become of increasing interest, and researchinto implementing such a semiconductor memory device is being activelyconducted.

SUMMARY

The inventive concept provides a semiconductor device having a 3Dstructure to overcome the conventional problem.

The inventive concept also provides a semiconductor memory device havinga 3D structure to minimize data skew and a driving method thereof.

The inventive concept also provides a data de-skewing method forreducing a data input/output time difference between layers that occursdue to their structure, in a semiconductor device having a 3D structure.

According to an aspect of the inventive concept, there is provided asemiconductor device including: a first semiconductor area with astacked structure of a first layer having first data and a second layerhaving second data; a first line for delivering an access signal foraccessing the first semiconductor area; and a second line for outputtingat least one of the first and the second data from the firstsemiconductor area, wherein access timings of accessing the first andsecond layers are controlled so that a first time delay from thedelivery of the access signal to the first layer to the output of thefirst data is substantially identical to a second time delay from thedelivery of the access signal to the second layer to the output of thesecond data.

According to another aspect of the inventive concept, there is provideda semiconductor memory device including: a cell area with a stackedstructure of a first layer having first data and a second layer havingsecond data; a first line for delivering an access signal for accessingthe cell area; and a second line for outputting data of the cell area,wherein access timings of accessing the first and second layers arecontrolled so that a first time delay from the delivery of the accesssignal to the first layer to output of the first data is substantiallyidentical to a second time delay from the delivery of the access signalto the second layer to output of the second data.

According to another aspect of the inventive concept, there is provideda semiconductor memory device including a plurality of layers of astacked structure, the semiconductor memory device including: a memoryarea including memory arrays disposed in at least two layers; a localwordline, which is disposed in correspondence with each of the layersand accesses each of the layers; a common wordline for providing awordline voltage to the memory area; a bitline disposed to output dataof the memory area; and a circuit area, which is disposed in any one ofthe plurality of layers, generates the wordline voltage, and interfacesthe data with the outside, wherein the common wordline provides thewordline voltage in the order from a layer relatively far from thecircuit area to a layer relatively near to the circuit area.

According to another aspect of the inventive concept, there is provideda method of de-skewing data in a semiconductor device having a threedimensional (3D) stacked structure, which includes a first semiconductorarea disposed in a plurality of layers of a stacked structure, a firstline for delivering an access signal for accessing the firstsemiconductor area, and a second line for inputting and outputting dataof the first semiconductor area, the method including: detecting a timedelay of inputting and outputting data through the second line in eachof the plurality of layers; and controlling access timings of theplurality of layers using the first line to compensate for a datainput/output time delay difference between the plurality of layers.

It is noted that aspects of the invention described with respect to oneembodiment, may be incorporated in a different embodiment although notspecifically described relative thereto. That is, all embodiments and/orfeatures of any embodiment can be combined in any way and/orcombination. These and other objects and/or aspects of the presentinvention are explained in detail in the specification set forth below.

BRIEF DESCRIPTION OF THE DRAWINGS

Exemplary embodiments of the inventive concept will be more clearlyunderstood from the following detailed description taken in conjunctionwith the accompanying drawings in which:

FIG. 1 is a schematic diagram of a cell array structure of asemiconductor memory device having a 3D stacked structure according tosome embodiments of the present inventive concept;

FIG. 2 is a schematic diagram of an example of the semiconductor memorydevice of FIG. 1 implemented with a phase change random access memory(PRAM);

FIG. 3 is a block diagram of a semiconductor memory device having a 3Dstacked structure according to some embodiments of the present inventiveconcept;

FIG. 4 is a detailed circuit diagram of the semiconductor memory deviceof FIG. 3;

FIG. 5 is an operational timing diagram for describing an activeoperation of a semiconductor memory device having the structure of FIG.4;

FIG. 6 is a schematic diagram for describing a de-skewing operation thatoccurs in the structure of FIG. 4;

FIGS. 7A and 7B are respectively a detailed circuit diagram and a timingdiagram for describing physical skew compensation that is performed inthe 3D semiconductor memory device shown in FIG. 4;

FIG. 8 is a detailed circuit diagram of a semiconductor memory devicehaving a 3D stacked structure according to some embodiments of thepresent inventive concept;

FIGS. 9A and 9B are respectively a detailed circuit diagram and astructural diagram of a semiconductor memory device having a 3D stackedstructure according to some embodiments of the present inventiveconcept;

FIG. 10 is a detailed circuit diagram of a semiconductor memory devicehaving a 3D stacked structure according to some embodiments of thepresent inventive concept;

FIGS. 11A to 11E are circuit diagrams and structural diagrams ofexamples in which extended first lines are disposed in both directionsof a Y axis;

FIGS. 12A and 12B are circuit diagrams of examples in which first linedrivers are alternately disposed in both sides of layers in a Y axisdirection;

FIG. 13 is a schematic diagram of an example in which adjacent top andbottom layers share second lines;

FIG. 14 is a cross sectional diagram for schematically showing arelationship between two adjacent top and bottom layers;

FIG. 15 is a block diagram for describing an example of controlling skewby grouping access timings of layers;

FIG. 16 is a side perspective view for schematically showing anapplication example of a 3D semiconductor device stacked using athrough-silicon via (TSV);

FIG. 17 is a flowchart of a test and calibration process for skewcompensation of a 3D semiconductor memory device;

FIG. 18 is a block diagram of application examples of the presentinventive concept connected to a memory controller;

FIG. 19 is a block diagram of an application example of an electronicsystem including a semiconductor memory device having a 3D stackedstructure;

FIG. 20 is a block diagram of an application example of a single-chipmicrocomputer including a semiconductor memory device having a 3Dstacked structure;

FIGS. 21 and 22 are block diagrams of application examples of a memorycard to which a 3D stacked semiconductor memory device of the presentinventive concept is applied when the 3D stacked semiconductor memorydevice is nonvolatile; and

FIGS. 23 to 25 are cross sectional diagrams of application examples inwhich a semiconductor memory device having a 3D stacked structure isintegrated in various ways.

DETAILED DESCRIPTION OF THE EMBODIMENTS

The present inventive concept now will be described more fullyhereinafter with reference to the accompanying drawings, in whichembodiments thereof are shown. However, this inventive concept shouldnot be construed as limited to the embodiments set forth herein. Rather,these embodiments are provided so that this disclosure will be thoroughand complete, and will fully convey the scope of the inventive conceptto those skilled in the art.

It will be understood that, although the terms first, second, etc. maybe used herein to describe various elements, these elements should notbe limited by these terms. These terms are only used to distinguish oneelement from another element. Thus, a first element discussed belowcould be termed a second element without departing from the scope of thepresent inventive concept. In addition, as used herein, the singularforms “a”, “an” and “the” are intended to include the plural forms aswell, unless the context clearly indicates otherwise. It also will beunderstood that, as used herein, the term “comprising” or “comprises” isopen-ended, and includes one or more stated elements, steps and/orfunctions without precluding one or more unstated elements, steps and/orfunctions. The term “and/or” includes any and all combinations of one ormore of the associated listed items.

It will also be understood that when an element is referred to as being“connected” to another element, it can be directly connected to theother element or intervening elements may be present. In contrast, whenan element is referred to as being “directly connected” to anotherelement, there are no intervening elements present. It will also beunderstood that the sizes and relative orientations of the illustratedelements are not shown to scale, and in some instances they have beenexaggerated for purposes of explanation.

Unless otherwise defined, all terms (including technical and scientificterms) used herein have the same meaning as commonly understood by oneof ordinary skill in the art to which this inventive concept belongs. Itwill be further understood that terms, such as those defined in commonlyused dictionaries, should be interpreted as having a meaning that isconsistent with their meaning in the context of the relevant art andthis specification and will not be interpreted in an idealized or overlyformal sense unless expressly so defined herein. The present inventiveconcept will now be described more fully hereinafter with reference tothe accompanying drawings, in which some embodiments are shown. Thisinventive concept, however, may be embodied in many different forms andshould not be construed as limited to the embodiments set forth herein.Rather, these embodiments are provided so that this disclosure will bethorough and complete, and will fully convey the scope of the inventionto those skilled in the art.

It should be construed that forgoing general illustrations and followingdetailed descriptions are exemplified and an additional explanation ofclaimed inventive concept is provided.

Reference numerals are indicated in detail in some embodiments of thepresent inventive concept, and their examples are represented inreference drawings. Throughout the drawings, like reference numerals areused for referring to the same or similar elements in the descriptionand drawings.

A memory device includes volatile memories, such as dynamic randomaccess memories (DRAMs) and static random access memories (SRAMs),ideally non-refreshing nonvolatile memories, such as phase change randomaccess memories (PRAMs), resistive random access memories (RRAMs) usingsubstances such as complex metal oxides with variable resistancecharacteristics, and magnetic random access memories (MRAMs) usingferromagnetic substances. Recently, there is a tendency to apply arefresh operation to even nonvolatile memories.

FIG. 1 is a schematic diagram of a cell array structure of asemiconductor memory device 10 having a 3D stacked structure.

Referring to FIG. 1, the semiconductor memory device 10 includes a cellarea having a plurality of cell layers CA0 to CAn stacked in a 3Dstructure.

In detail, any one cell layer (e.g., CA0) of the plurality of celllayers CA0 to CAn includes wordlines WL disposed lengthwise in a Y axisdirection, bitlines BL disposed lengthwise in an X axis direction, whichis perpendicular to the Y axis direction, and memory cells disposed atcross points of the wordlines WL and the bitlines BL.

Any one cell layer (e.g., CA0) of the plurality of cell layers CA0 toCAn has a 2D structure and includes a memory cell array structure of atypical semiconductor memory device. Here, the typical semiconductormemory device may include the volatile and/or nonvolatile memoriesdescribed above.

The plurality of cell layers CA0 to CAn are stacked with a predeterminedspace therebetween in a Z axis direction perpendicular to both of the Yaxis direction and the X axis direction.

Although the plurality of cell layers CA0 to CAn are stacked with apredetermined space therebetween or isolated through insulatingmaterials disposed therebetween in FIG. 1, the present inventive conceptis not limited thereto. That is, at least one layer CA0 to CAn may bestacked to be adjacent to each other so that the adjacent layers canshare at least one of wordlines WL or bitlines BL.

Each of the memory cells of the plurality of cell layers CA0 to CAn hasa unit cell structure of the memory device described above.

For example, a DRAM may be comprised of a single cell transistor and asingle capacitor or may comprise a single capacitorless transistor, anRRAM may be comprised of a single variable resistance device, and a PRAMmay be comprised of a single variable resistance device R and a diodedevice D.

FIG. 2 is a schematic diagram of an example of the semiconductor memorydevice of FIG. 1 implemented with a PRAM.

Even though the number of wordlines WL is generally not the same as thenumber of bitlines BL, for convenience of understanding FIG. 2illustrates that the number of wordlines WL is the same as the number ofbitlines BL.

In addition, although, as illustrated, the number of layers CA0 to CAnis identical to the number of wordlines WL or the number of bitlines BLin FIG. 2, the actual number of layers CA0 to CAn may be different fromthe number of wordlines WL and/or the number of bitlines BL. Variouskinds of reference characters and reference numerals shown in FIG. 2 areonly examples for convenience of description of exemplary embodiments ofthe present inventive concept, and exemplary embodiments of the presentinventive concept are not limited thereto and various changes in formand details may be made therein.

Referring to FIG. 2, a first layer CA0 includes a plurality of (e.g.,n+1) bitlines BL00 to BL0 n disposed lengthwise in the X axis directionwith a predetermined space therebetween and a plurality of (e.g., n+1)wordlines WL00 to WL0 n disposed lengthwise in the Y axis direction witha predetermined space therebetween.

A memory cell 13 is disposed at each of the crossing points of thewordlines WL00 to WL0 n and the bitlines BL00 to BL0 n.

A second layer CA1 includes a plurality of (e.g., n+1) bitlines BL10 toBL1 n disposed lengthwise in the X axis direction with a predeterminedspace therebetween and a plurality of (e.g., n+1) wordlines WL10 to WL1n disposed lengthwise in the Y axis direction with a predetermined spacetherebetween.

A memory cell is disposed at each of the crossing points of the bitlinesBL10 to BL1 n and the wordlines WL10 to WL1 n.

As described above, the second layer CA1 has the same structure as thefirst layer CA0. In addition, third to (n+1)th layers CA2 to CAn, whichare only distinguished by having different numbers of wordlines WL andbitlines BL, also have the same structure as the first layer CA0 and thesecond layer CA1.

Diodes of PRAM memory cells of the first to (n+1)th layers CA0 to CAnmay include a material selected from among amorphous silicon, SiGe, andpolycrystalline silicon, among others.

For example, diodes in the first layer CA0 may include polycrystallinesilicon, and the other layers CA1 to CAn may include amorphous siliconor SiGe.

FIG. 3 is a block diagram of a semiconductor device 10 having a 3Dstacked structure according to some embodiments of the present inventiveconcept.

The de-skew concept of the present inventive concept is not limited toan operation of a semiconductor memory device and is applicable to a 3Dsemiconductor device in which skew occurs in a data input/output timingbetween layers, which is due to the physical stacked structure. Here, amemory device is described as an example for convenience of description.

Referring to FIG. 3, the semiconductor device 10 having a 3D structureincludes a plurality of layers CA0 to CAn of a stacked structure. Forexample, the semiconductor device 10 of FIG. 3 may include a firstsemiconductor area 11 in which the first to (n+1) layers CA0 to CAn arestacked and a second semiconductor area 12 including an interfacecircuit for interfacing with the outside.

The second semiconductor area 12 may be disposed in a different layerfrom the first semiconductor area 11. However, the second semiconductorarea 12 may be disposed in any one of the layers CA0 to CAn of the firstsemiconductor area 11.

The semiconductor device 10 includes a first line WL for accessing thefirst semiconductor area 11 and a second line BL for deliveringinformation to input/output the information to/from the firstsemiconductor area 11.

Although a single first line WL and a single second line BL are shownfor each layer in FIG. 3, a plurality of first lines and second lines asshown in FIG. 2 may be disposed in the semiconductor device 10 of FIG.3.

The first to (n+1) layers CA0 to CAn provide or receive information toand/or from the outside through a control logic circuit and/or aninterface in the same chip or package. Meanwhile, in a case of asemiconductor memory, the information inputting and outputting describedabove may be achieved through data read and write operations.

When the information inputting and outputting is achieved, a differencein physical length between the first line WL and/or the second line BLof the first to (n+1) layers CA0 to CAn is inevitably generated.

For example, if an access signal for accessing information for each ofthe layers CA0 to CAn is provided by a driver (e.g., an X-driver) of thesecond semiconductor area 12, when the access signal is delivered toeach of the layers CA0 to CAn, a difference in the physical lengthbetween access signal delivery paths occurs.

In addition, if information of each of the layers CA0 to CAn isdelivered to a buffer (e.g., an input/output buffer Din/Dout) of thesecond semiconductor area 12, a physical length difference occurs in aninformation delivery path through the secondary line BL.

Due to these differences in physical lengths, when the plurality oflayers CA0 to CAn are accessed, a different time delay occurs in anactual data input/output for each layer. This time delay difference in adata input/output between layers is referred to as skew.

Meanwhile, when a switching device or a delay device is formed in thelayers CA0 to CAn, the skew problem described above may be solved byusing the switching device or the delay device. An example of theswitching device or the delay device includes a transistor.

However, in a structure of a cross-point 3D memory, such as a 3D RRAM orPRAM, having a monolithic structure, each of the layers CA0 to CAn iscomprised of a resistive device and a diode in each cell, and devicessuch as a transistor and a switch are not formed.

This can be applied in the same way to a structure in which a cell areaof a general DRAM, SRAM, or flash memory is stacked. For example, aresistive delay component may be differently added to each of the layersCA0 to CAn to reduce skew between layers.

However, in the above-described structure, a method for compensating forskew without adding a unit device, such as a switching device or a delaydevice, to the layers CA0 to CAn must be considered.

To do this, a physical distance of an access signal through the firstline WL and/or an information delivery path through the second line BLcan be adjusted to compensate for an amount of skew due to a structuraldistance of the first line WL for accessing and/or the second line BLfor inputting/outputting, i.e., an amount of skew according tointer-layer physical arrangements.

The first line WL may include a common wordline or a main wordline in amethod having a hierarchical structure and may further include a signalline or a control line for controlling such a wordline.

The second line BL may include a common bitline or an input/output (I/O)line (global I/O or local I/O).

Meanwhile, FIG. 3 shows an example in which the second semiconductorarea 12, e.g., an interface area, is disposed at the bottom of thestacked layers CA0 to CAn.

The second semiconductor area 12 may include an address buffer 12_6 forreceiving and buffering an address from the outside, a command buffer12_5 for receiving, buffering, and decoding a command from the outside,a data I/O unit 12_2 for inputting and outputting data to and from thefirst semiconductor area 11 through the second line BL, an X-driver 12_1for controlling the first line WL, a Y-driver 12_3 for controlling aninput/output of the second line BL, and a periphery circuit 12_4including a voltage generator for generating a necessary source voltageand a logic circuit for controlling a general operation.

The second semiconductor area 12 may be disposed in the lowest layer asshown in FIG. 3, between layers, or in the uppermost layer. Although thesecond semiconductor area 12 is included in the semiconductor device 10in FIG. 3, the second semiconductor area 12 can be implemented as a chipor package separate from the semiconductor device 10.

When the first line WL is disposed in the vertically same position ofthe layers CA0 to CAn, the first line WL may or may not be shared by thelayers CA0 to CAn, and when the second line BL is disposed in thevertically same position of the layers CA0 to CAn, the second line BLmay or may not be shared by the layers CA0 to CAn. For example, when thefirst line WL is defined as a path for delivering an access signal fromthe X-driver 12_1 of the second semiconductor area 12 to each layer ofthe first semiconductor area 11, the layers CA0 to CAn can share thefirst line WL (in detail, share a portion of the primary line WL). Thiswill be dealt with in detail by way of the embodiments below.

The above-described method for adjusting a physical distance may, inother words, include sequential access from a layer in an oppositedirection of (and a far physical distance from) the second semiconductorarea 12 during access to the first line WL and/or the second line BL,and this means that actual access is achieved in a direction opposite toa direction where the access physically arrives.

Besides the physical skew compensation method described above, skew maybe compensated for in the second semiconductor area 12 or the outside.This can be achieved through a Clock Data Recovery (CDR) method, aper-pin skew compensation method, or a combination thereof. This may beachieved through the methods disclosed in U.S. Pat. No. 7,542,362 andU.S. Patent Publication No. 2008/0130811 contained herein in theirentireties by reference.

FIG. 4 is a detailed circuit diagram of the semiconductor device of FIG.3. FIG. 4 shows a semiconductor memory device including a memory cell asthe semiconductor device.

A connection structure of primary lines WL00 to WLnn will now bedescribed with reference to FIG. 4. Primary lines (e.g., WL00, WL10, . .. , WLn0) respectively selected in the layers (cell layers) CA0 to CAnare commonly connected to each other.

For example, first lines (e.g., WL00, WL10, . . . , WLn0) disposed inthe same position are commonly connected to each other. The first lines(e.g., WL00, WL10, . . . , WLn0) disposed in the same position may meanfirst lines (e.g., WL00, WL10, . . . , WLn0) using the same X-address inthe layers CA0 to CAn.

Thus, a plurality of first lines (e.g., the first lines WL00, WL10, . .. , WLn0) corresponding to one first line per layer can be accessed(e.g., enabled) at the same time with a single X-address. Accordingly,the number of X-addresses applied to select a specific memory cell isidentical to the number of first lines WL00, WL10, . . . , WLn0 in asingle layer (e.g., CA0), that is, as in a regular cell array structure.

The first lines (e.g., WL00, WL10, . . . , WLn0), which are commonlyconnected for the layers CA0 to Can, are controlled by a single firstline driver (e.g., WD0). That is, a first line driver generates anaccess signal in response to a single first line enable signal (e.g.,WE0), and the access signal can enable the commonly connected firstlines (e.g., WL00, WL10, . . . , WLn0) at the same time.

As shown in FIG. 4, when each of the layers CA0 to CAn includes a memorycell, the first lines WL00 to WLnn are wordlines, and the access signalcorresponds to a voltage level signal for allowing access to thewordlines.

A structure in which first lines of the layers CA0 to CAn are commonlyconnected can be understood as a common signal delivery path existing todeliver an access signal to the first lines of the layers CA0 to CAn.

For example, an access operation can be performed by delivering anaccess signal provided by a first line driver (e.g., WD0) in apredetermined direction (e.g., Z axis direction) and then delivering theaccess signal, which has been provided in the predetermined direction,in another direction (e.g., −Z axis direction) in each of the layers CA0to CAn. In this case, the delivery path of the access signal in the Zaxis direction (and −Z axis direction) can be shared in the layers CA0to CAn. Each first line may be disposed in the common delivery path ofthe access signal or may include a delivery path in each layer, which isseparated and disposed in each layer.

When each first line is defined as a delivery path separated anddisposed in each layer, a third line may be further included in thesemiconductor memory device 10 as a path (path in the Z axis directionand the −Z axis direction) for commonly delivering the access signal.

A connection structure of second lines BL00 to BLnn will now bedescribed.

Each of the second lines BL00 to BLnn disposed in the layers CA0 to CAnis independently operated. For example, when a Y-address is applied toselect a specific memory cell, the number of Y-addresses is identical tothe number of second lines BL00 to BLnn.

The second lines BL00 to BLnn are connected to global second lines GBL0to GBLn through selection transistors N00 to Nnn. The number of globalsecond lines GBL0 to GBLn may be identical to the number of second lines(e.g., BL00, BL01, . . . , BL0 n) in a single layer (e.g., CA0). Secondlines (e.g., BL00, BL10, . . . , BLn0) disposed in the same position ineach of the layers CA0 to Can, among the second lines BL00 to BLnn, arecommonly connected to one (e.g., GBL0) of the global second lines GBL0to GBLn through corresponding selection transistors (e.g., N00 to Nn0).

Second lines (e.g., BL00, BL10, . . . , BLn0) disposed in the sameposition in each of the layers CA0 to CAn may mean second lines (e.g.,BL00, BL10, . . . , BLn0) using the same Y-address in each of the layersCA0 to CAn. In this case, the number of second lines of each of thelayers CA0 to CAn enabled by a single Y-address is one.

FIG. 5 is an operational timing diagram for describing an activeoperation (read or write operation) of a semiconductor memory devicehaving the structure of FIG. 4. An operation of a semiconductor memorydevice according to some embodiments of the present inventive conceptwill now be described with reference to FIGS. 4 and 5.

FIG. 5 shows a case of reading or writing data from or to a memory cell13 disposed at a cross point of a 1^(st) second line BL00 and a 1^(st)first line WL00 of the first layer CA0 shown in FIG. 4.

Referring to FIG. 5, in a stand-by state, all of the second lines BL00to BLnn maintain a floating state and all of the first lines WL00 toWLnn maintain a state where a source voltage VCC/VDD or a voltage VPP ofa predetermined level higher than the source voltage VCC/VDD is applied.

When a read operation for reading data from the memory cell 13 starts,the 1^(st) first line WL00 and the 1^(st) second line BL00 connected tothe memory cell 13 are enabled to select the memory cell 13.

That is, a first line enable signal WE0 for selecting the 1^(st) firstline WL00 of the first layer CA0 is applied to a 1^(st) first linedriver WD0 at the source voltage VCC or at a level VPP that is higherthan the source voltage VCC. The 1^(st) first line driver WD0 generatesan access signal for accessing each of the layers CA0 to CAn.

While normally, the access signal is first delivered to the 1^(st) firstline WL00 of the first layer CA0 physically nearest the 1^(st) firstline driver WD0 and then sequentially delivered to layers in the topdirection (Z axis direction), skew occurring due to a data input/outputdelay difference between layers according to a physical distance iscompensated for in the present inventive concept.

To do this, the access signal is first delivered to a layer of the firstsemiconductor area 11, which has the farthest physical distance from thesecond semiconductor area 12, which is an interface area, (it is assumedthat the second semiconductor area 12 is located in the lowest layer),to first enable a first line WLn0 of the uppermost layer CAn.

For example, when first lines WL00, WL10, . . . , WLn0 of the layers CA0to CAn, which have the same X-address, receive the access signal througha common path, third lines W0 to Wn may be disposed as the commondelivery path of the access signal and may include lines for deliveringthe access signal in a direction (Z axis direction) from the first layerCA0 to the (n+1)th layer CAn and lines for delivering the access signalin a direction (−Z axis direction) from the (n+1)th layer CAn to thefirst layer CA0. The access signal is sequentially provided to thelayers CA0 to CAn through the lines for delivering the access signal inthe negative Z axis direction.

When it is defined that the first lines WL00, WL10, . . . , WLn0 includethe third lines W0 to Wn, the third lines W0 to Wn may be defined asextended first lines. In addition, since extended first lines fordelivering the access signal in the positive Z axis direction are notdirectly connected to the layers CA0 to CAn, the first lines extended inthe positive Z axis direction may be dummy lines.

First line drivers WD0 to WDn may be formed with an inverter. And, forexample, when first line enable signal WE0 is applied to the first linedriver WD0, the 1^(st) first line WL00 of the first layer CA0 and firstlines WL10 to WLn0 commonly connected to the 1^(st) first line WL00 ofthe first layer CA0 are enabled to a ground level (0V). Here, the firstline enable signals WE0 to WEn are generated when an X-address isapplied.

In addition, a 1^(st) global second line GBL0 is selected to select the1^(st) second line BL00 of the first layer CA0, thereby enabling aY-selection signal CS00 to the source voltage level VCC or the level VPPthat is higher than the source voltage level VCC. The Y-selection signalCS00 turns on a selection transistor N00 connected to the 1^(st) secondline BL00 of the first layer CA0 to electrically connect the 1^(st)second line BL00 of the first layer CA0 to the 1^(st) global second lineGBL0. Accordingly, a read voltage Vread applied through the 1^(st)global second line GBL0 is delivered to the 1^(st) second line BL00 ofthe first layer CA0. At this time, the other Y-selection signals CS(1 ton)0 and CS(0 to n)(1 to n) maintain a disable state at the ground level.

The second lines BL0(1 to n) and BL(1 to n)(0 to n), excluding the1^(st) second line BL00 of the first layer CA0, maintain the floatingstate. For the 1^(st) second line BL00 of the first layer CA0 or all ofthe second lines BL0(0 to n) of the first layer CA0, when a readoperation starts, i.e., just before the read voltage Vread is applied, adischarge operation of discharging the 1^(st) second line BL00 of thefirst layer CA0 or all of the second lines BL0(0 to n) of the firstlayer CA0 to the ground voltage (0V) may be performed. This dischargingof the second line is done so that a floating voltage of a second linedoes not affect the read operation since a state of the second linecannot be correctly defined when the second line is in the floatingstate.

In addition, the reason why the second lines BL00 to BLnn are maintainedin the floating state in the stand-by state or a non-selection state isto prevent or minimize a leakage current through the second lines BL00to BLnn.

Thereafter, data is read by sensing a level state of the 1^(st) secondline BL00 from the memory cell 13 of the first layer CA0.

In a write operation, since the same operation as the above-describedread operation is performed, except for applying a write voltage Vwriteto the 1^(st) second line BL00 of the first layer CA0, a detaileddescription thereof will be omitted here. However, in the writeoperation, a discharge operation for the second line(s) may not beperformed.

FIG. 6 is a schematic diagram for describing a de-skewing operation thatoccurs in the structure of FIG. 4. The diagram of FIG. 6 shows anexample in which 8 layers are stacked.

Referring to FIG. 6 (a), it can be determined that inter-layer skew iscompensated for due to a sequential inverse proportion of skew andde-skew.

When a second semiconductor area, e.g., an interface area (not shown),is located below a first layer CA0, an eighth layer CA7 located at thetop has the longest physical length of second lines BL70 to 7 n fordelivering data in terms of inputting/outputting the data. Thus, a timedelay when the data of the eighth layer CA7 is delivered to theinterface area is greater than the other layers. In FIG. 6 (a), a rightsection represented with slashed lines indicates a delay from dataaccess to data input/output.

In a general case, since a layer near the interface area has a smalltime delay, a time delay difference occurs in proportion to a physicaldistance from the eighth layer CA7 to the first layer CA0, and the timedelay difference is referred to as skew.

To compensate for the above-described skew, an access operation issequentially performed from the eighth layer CA7, i.e., from a layerhaving a large time delay. That is, by controlling a layer having alarge time delay to have a short time interval from a driving time of anaccess signal to an access time of the layer, skew is compensated for,thereby balancing most skew. A left section represented with whiteindicates a time interval until an access signal is delivered to each ofthe layers CA0 to CA7 after being driven.

In terms of a time delay from when an access signal is driven to whendata is output from each layer (or when the data is delivered to anoutput driver (not shown) in the interface area), the compensation ofskew means that time delays from driving of an access signal to anoutput of data for respective layers are substantially identical to eachother. That is, each of the time delays from driving an access signal tooutputting data can be defined as a sum of a delay from when the accesssignal is driven to when the access signal is delivered to acorresponding layer and a delay until the data is delivered to theinterface area. By controlling the inter-layer time delays to besubstantially identical to each other, data from the plurality of layersCA0 to CA7 can be substantially delivered to the interface area at thesame time.

FIG. 6( b) shows an example for describing de-skewing with first linesWL00 to WL7 n as wordlines and second lines BL00 to BL7 n as bitlines.

When skew occurs due to a long physical distance from wordline driversWD0 to WD7, wordline access is performed for enabling wordlines from theeighth layer CA7 having the largest time delay of a data input/outputdue to the longest physical distance. This can be designed by usingextended wordlines (and can be referred to as main wordlines or controllines).

FIGS. 7A and 7B are respectively a detailed circuit diagram and a timingdiagram for describing physical skew compensation that is performed inthe 3D semiconductor memory device shown in FIG. 4.

Since a structure of FIG. 7A is the same as the structure of FIG. 4, adetailed description of the configuration and operation thereof will beomitted here.

Using the circuit of FIG. 7A, access timings and data read timings ofmemory cells controlled by an (n+1)th first line driver WDn may becompared with each other. For convenience of description, access timingsand data read timings of only 3 memory cells C0, C1, and Cn are comparedwith each other. The memory cells C0, C1, and Cn are accessed throughrespective primary lines WL0 n, WL1 n, and WLnn sharing an extendedprimary line Wn.

FIG. 7B is a timing diagram for describing a data read timing when datais read in FIG. 7A.

Referring to FIGS. 7A and 7B, when a read command RD is input by beingsynchronized with a rising edge of an external clock CK, an (n+1)thfirst line enable signal WEn is input to an (n+1)th first line driverWDn through an operation (not shown) of decoding a correspondingX-address (low address).

The (n+1)th first line driver WDn applies a ‘low enable’ signal as anaccess signal to an (n+1)th extended first line Wn. At this time, an(n+1)th wordline WLnn of an (n+1)th layer CAn is enabled according to aphysical connection relationship of the (n+1)th extended first line Wn.A delay from a driving time of the access signal to activation of the(n+1)th wordline WLnn is ‘tA1’.

Thereafter, an (n+1)th wordline WL1 n of a second layer CA1 is enabled,and a delay for this access is ‘tA2’. Thereafter, an (n+1)th wordlineWL0 n of a first layer CA0 is enabled, and a delay for this access is‘tA3’.

According to a relationship among ‘tA1’, ‘tA2’, and ‘tA3’, it can bedetermined that ‘tA3’ is the largest as shown in FIG. 7B.

Meanwhile, second lines BL0 n, BL1 n, and BLnn for outputting data fromthe respective cells C0, C1, and Cn from which data is read areseparated for the respective layers, and a relationship among timedelays ‘tB1’, ‘tB2’, and ‘tB3’ of data input/output from the respectivecells C0, C1, and Cn is inversely proportional to the relationship among‘tA1’, ‘tA2’, and ‘tA3’. That is, ‘tB1’ is the largest, and ‘tB3’ is thesmallest.

Thus an affect due to skew is reduced by adjusting delay times so thatdelay times of the respective layers CA0 to CAn during access in termsof de-skew and delay times of the respective layers CA0 to CAn duringdata input/output in terms of skew are cleared therebetween.

As shown in FIG. 7B, ‘ta’ denotes a time when data delivered(input/output) through secondary lines are actually sensed and showsthat data can be simultaneously sensed from a plurality of layers sincethere is little inter-layer skew. The data according to the sensingoperation can be provided to the outside as output data. Accordingly, itcan be determined that data is output without substantial skew from aread command generation time to a data output time for the layers CA0 toCAn.

FIG. 8 is a detailed circuit diagram of a semiconductor memory devicehaving a 3D stacked structure according to another exemplary embodimentof the present inventive concept.

Referring to FIG. 8, second lines (e.g., BL00, BL10, . . . , BLn0)selected from respective layers CA0 to CAn are commonly connected toeach other.

For example, second lines (e.g., BL00, BL10, . . . , BLn0) disposed inthe same position are commonly connected to each other. Here, the secondlines (e.g., BL00, BL10, . . . , BLn0) disposed in the same position maymean second lines (e.g., BL00, BL10, . . . , BLn0) using the sameY-address in the respective layers CA0 to CAn.

Accordingly, a plurality of second lines selected for the layers CA0 toCAn, that is, one per layer, can be enabled at the same time with asingle Y-address, and the number of Y-addresses applied to select aspecific layer is identical to the number of second lines (e.g., BL00 toBL0 n) in a single layer (e.g., CA0) having the same structure as aregular layer structure.

In addition, second lines (e.g., BL00, BL10, . . . , BLn0) commonlyconnected for the respective layers CA0 to CAn are controlled by asingle selection transistor (e.g., N0). Due to this, commonly connectedsecond lines (e.g., BL00, . . . , BL10, BLn0) are enabled at the sametime by a single Y-selection address (e.g., CS0).

The second lines BL00 to BLnn are connected to the global second linesGBL0 to GBLn through the Y-selection transistors N0 to Nn, respectively.The number of global second lines GBL0 to GBLn may be identical to thenumber of second lines (e.g., BL00 to BL0 n) in a single layer (e.g.,CA0).

Second lines (e.g., BL00, BL10, . . . , BLn0) disposed in the sameposition of the layers CA0 to CAn among the second lines BL00 to BLnnare commonly connected to one (e.g., GBL0) of the global second linesGBL0 to GBLn through a single selection transistor (e.g., N0).

Since structures of the first lines WL00 to WLnn and the extended firstlines W0 to Wn are substantially the same as the structures of FIGS. 4and 7A, a detailed description thereof will be omitted here.

First lines (e.g., WL0 n to WLnn) of the layers CA0 to CAn, which havethe same X-address, are controlled through an extended first line (e.g.,Wn), and a data input/output time delay between the layers CA0 to Can,which occurs due to the physical structure of input/output lines (secondlines), can be compensated for by using the extended first line (e.g.,Wn).

In the above-described configuration, since the first lines WL00 to WLnnare commonly connected between layers having the same X-address and thesecond lines BL00 to BLnn are commonly connected between layers havingthe same Y-address, although not shown, when data is input/output,memory cells 13 of layers for which the second lines BL00 to BLnn arecommonly connected cannot be independently controlled by only using theselection transistors N0 to Nn, so an additional switching control isnecessary. This switching control can be performed through the interfacearea disposed inside or outside the memory device 10 or through aseparate chip.

In some embodiments, a functional block for performing the switchingcontrol function may be added between the second lines BL00 to BLnn andthe selection transistors N0 to Nn in FIG. 8. For example, a switchblock for switching in response to a predetermined control signal may beadded to second lines of each layer, or a switch block may be added to asecond line (e.g., an extended secondary line) commonly used toinput/output data of the layers CA0 to CAn.

FIGS. 9A and 9B are respectively a detailed circuit diagram and astructural diagram of a semiconductor memory device having a 3D stackedstructure according to some embodiments of the present inventiveconcept.

Since the arrangement of layers CA0 to CAn and second lines BL00 to BLnnis the same as the configuration of FIG. 8, a detailed descriptionthereof will be omitted here. However, since a configuration of firstlines WL00 to WLnn and extended first lines W00 to Wnn is different fromFIG. 8, this different configuration will now be described.

As shown in FIG. 9A, all of the primary lines WL00 to WLnn disposed inthe respective layers CA0 to CAn are independently operated.Furthermore, the extended first lines W00 to Wnn connected to the firstlines WL00 to WLnn are also independently operated for the respectivelayers CA0 to CAn.

Due to these structural characteristics, when an X-address is applied toselect a specific memory cell, the number of X-addresses is identical tothe number of first lines WL00 to WLnn, and the number of extended firstlines W00 to Wnn is also identical to the number of first lines WL00 toWLnn.

The first lines WL00 to WLnn are independently enabled through firstline drivers WD00 to WDnn and the extended first lines W00 to Wnn. Thenumber of first line drivers WD00 to WDnn may also be identical to thenumber of first lines WL00 to WLnn.

Although the first line drivers WD00 to WDnn are disposed in the sameplane as the respective layers CA0 to CAn in FIG. 9A, this is only forconvenience of description, and the first line drivers WD00 to WDnn maybe disposed in an interface area inside or outside the actual memorydevice 10. Furthermore, the first line drivers WD00 to WDnn may bedisposed in a separate chip outside the memory device 10.

A relationship between delivery of an access signal to each layer and atime delay of data from each layer in the memory device 10 of FIG. 9Awill now be described with reference to FIGS. 9A and 9B.

The first line drivers WD00 to WDnn for driving the primary lines WL00to WLnn of the layers CA0 to CAn are disposed. In this case, the firstline drivers WD00 to WDnn may be separately disposed in correspondencewith the layers CA0 to CAn, respectively. For example, the first linedrivers WD00 to WD0 n for driving the first lines WL00 to WL0 n of thefirst layer CA0, the first line drivers WD10 to WD1 n for driving thefirst lines WL10 to WL1 n of the second layer CA1, and the first linedrivers WDn0 to WDnn for driving the first lines WLn0 to WLnn of the(n+1)th layer CAn may be disposed.

Alternatively, the first line drivers WD00 to WDnn may be disposed in alayer (e.g., a layer in which the interface area is disposed) that isdifferent from the layers CA0 to CAn, and the layer in which theinterface area is disposed may be disposed below the layers CA0 to CAn.In this case, the first line drivers WD00 to WD0 n for the first layerCA0 are connected to the first layer CA0 through the extended firstlines W00 to W0 n, and the first line drivers WD10 to WD1 n for thesecond layer CA1 are connected to the second layer CA1 through theextended first lines W10 to W1 n.

An access signal is delivered in a direction from a layer (e.g., the(n+1)th layer CAn) for which an output timing is late to a layer (e.g.,the first layer CA0) for which an output timing is early so that dataoutput timings of the layers CA0 to CAn are substantially the same. Todo this, the first line drivers WDn0 to WDnn for driving the first linesWLn0 to WLnn of the (n+1)th layer CAn are first driven to deliver theaccess signal to the (n+1)th layer CAn. Thereafter, the access signal issequentially delivered to the other layers (e.g., the nth layer, the(n−1)th layer, the (n−2)th layer, . . . , the second layer, and thefirst layer) with a predetermined time interval between each layer.

Skew related to the data output timings is compensated for bycontrolling a delivery time of an access signal to each of the layersCA0 to CAn. For example, the data from the layers CA0 to CAn is providedto an output driver, which may be disposed in the interface area, anddata delivery delays occur due to differences in the physical distancesbetween the layers CA0 to CAn and the interface area. When Dn denotes adelay from the (n+1)th layer CAn and D1 denotes a delay from the secondlayer CA1, Dn is greater than D1. To compensate for this delaydifference, a time difference between a delivery time of the accesssignal to the (n+1)th layer CAn and a delivery time of the access signalto the second layer CA1 is controlled to be (Dn−D1). Since a delay mayoccur in the delivery of the access signal through the extended firstlines W10 to W1 n, delivery times of the access signal to the (n+1)thlayer CAn and the second layer CA1 can be controlled by controlling adriving time of the first line drivers WDn0 to WDnn for the (n+1)thlayer CAn and a driving time of the first line drivers WD10 to WD1 n forthe second layer CA1 The method of controlling access signal deliverytimes is commonly applied to the other layers.

Meanwhile, to define the data delivery delays, although the descriptionhas been disclosed based on a time when data accessed from each layer isdelivered to an output driver of the interface area, the presentinventive concept is not limited thereto. The interface area may furtherinclude a latch (not shown) for temporarily storing the accessed databefore delivering the data to the output driver, and the delays may bedefined based on a time when the data accessed from each layer isdelivered to the latch.

FIG. 10 is a detailed circuit diagram of a semiconductor memory devicehaving a 3D stacked structure according to another exemplary embodimentof the present inventive concept.

The arrangement of layers CA0 to CAn and second lines BL00 to BLnn isthe same as the configuration of FIG. 7A, and a configuration of firstlines WL00 to WLnn and extended first lines W00 to Wnn is the same asthe configuration of FIG. 9A.

That is, all of the first lines WL00 to WLnn disposed in the respectivelayers CA0 to CAn are independently operated, and the second lines BL00to BLnn are also independently operated.

Although FIGS. 7A to 10 described above have differences in that thefirst lines WL00 to WLnn and the second lines BL00 to BLnn are shared orseparated between the layers CA0 to CAn, FIGS. 7A to 10 have the sameconcept in that inter-layer skew is compensated for by controlling adata input/output time delay per layer through a corresponding accesstiming.

In addition, although the extended first lines W0 to Wn and W00 to Wnnare disposed in one direction, e.g., the Z axis direction in theabove-described embodiments, the extended first lines W0 to Wn and W00to Wnn can be disposed in any other direction.

The extended first lines W0 to Wn and W00 to Wnn may also be disposed inseveral directions at the same time, and this will be described below.

FIGS. 11A to 11E are circuit diagrams and structural diagrams ofexamples in which extended first lines are disposed in both directionsof the Y axis.

Referring to FIGS. 11A and 11B, first line drivers WD0 to WDn aredisposed in both sides of layers CA0 to CAn in the positive Y axisdirection and the negative Y axis direction.

In detail, the first line drivers WD0 to WDn disposed in the negative Yaxis direction are connected to partial layers (e.g., even-th layersCA1, CA3, CA5, . . . ) in the positive Y axis direction, and the firstline drivers WD0 to WDn disposed in the positive Y axis direction areconnected to other partial layers (e.g., odd-th layers CA0, CA2, CA4, .. . ) in the negative Y axis direction.

Alternatively, the first line drivers WD0 to WDn disposed in thenegative Y axis direction may be connected to the odd-th layers (CA0,CA2, CA4, . . . ) in the same direction (the negative Y axis direction),and the first line drivers WD0 to WDn disposed in the positive Y axisdirection may be connected to the even-th layers (CA1, CA3, CA5, . . . )in the same direction (the positive Y axis direction).

FIG. 11B schematically shows the first line connection structure shownin FIG. 11A, with the first line driver WD0 in the negative Y axisdirection and the positive Y axis direction. That is, when the firstline drivers WD0 to WDn disposed in any one direction deliver an accesssignal to the plurality of layers CA0 to CAn, the access signal isdelivered to partial layers in the positive Z axis direction with apredetermined interval between each partial layer and then delivered toother partial layers in the negative Z axis direction with thepredetermined interval between each of the other partial layers.

Meanwhile, in FIG. 11A, when the total number of layers CA0 to CAn is anodd number, the uppermost layer CAn corresponds to an odd-th layer, andaccordingly, the first line drivers WD0 to WDn disposed in the positiveY axis direction and the uppermost layer CAn are connected in thenegative Y axis direction. If the total number of layers CA0 to CAn isan even number, the connection diagram shown in FIG. 11A may be changed.

For the above-described connection structure, extended first linesdisposed perpendicularly to the surfaces of the layers CA0 to CAn aredisposed in both sides of the layers CA0 to CAn, and lines forelectrically connecting the extended first lines disposed in both sidesto each other may be disposed on the layers CA0 to CAn.

An access signal generated by the first line drivers WD0 to WDn in thenegative Y axis direction is delivered across the layers CA0 to CAnthrough the extended first lines, and the access signal delivered in thepositive Y axis direction is delivered to the even-th layers (CA1, CA3,CA5, . . . ). On the other hand, an access signal generated by the firstline drivers WD0 to WDn in the positive Y axis direction is deliveredacross the layers CA0 to CAn through the extended first lines, and theaccess signal delivered in the negative Y axis direction is delivered tothe odd-th layers (CA0, CA2, CA4, . . . ).

That is, the first line drivers WD0 to WDn in the negative Y axisdirection are driven to input/output data of the even-th layers (CA1,CA3, CA5, . . . ), and the first line drivers WD0 to WDn in the positiveY axis direction are driven to input/output data of the odd-th layers(CA0, CA2, CA4, . . . ).

When the first line drivers WD0 to WDn in the negative Y axis directionare driven, the access signal is alternately delivered to all of thelayers CA0 to CAn. However, an affect due to the above-described timedelays is reduced by selecting only second lines corresponding to theeven-th layers (CA1, CA3, CA5, . . . ).

When any one first line driver (e.g., driver WD0 in the positive Y axisdirection) is operated, a corresponding first line driver in the otherside (e.g., driver WD0 in the negative Y axis direction) maintains ahigh impedance state Hi-Z.

An operation of a 3D semiconductor memory device having theabove-described structure is substantially the same as or similar to thestructures described with reference to FIGS. 7A to 10. However, a timedelay of a data input/output is compensated for by disposing the firstline drivers WD0 to WDn in both sides of the layers CA0 to CAn and usingthe physical arrangement of the extended first lines to deliver anaccess signal of the first line drivers WD0 to WDn disposed in bothsides.

Access control is achieved in an opposite direction to the physicalarrangement of the first line drivers WD0 to WDn in FIG. 11A, but accesscontrol in the same direction as the physical arrangement can also beperformed, and this will now be described.

FIG. 11C is a circuit diagram of a modified example of FIG. 11A.

Referring to FIG. 11C, a dummy line structure is arranged so that firstline drivers WD0 to WDn in the negative Y axis direction are connectedto even-th layers CA1, CA3, CA5, . . . , CAn−1 in the same direction,i.e., the negative Y axis direction.

Similarly, a dummy line structure is arranged so that first line driversWD0 to WDn in the positive Y axis direction are connected to odd-thlayers CA0, CA2, CA4, . . . , CAn in the same direction, i.e., thepositive Y axis direction. The first line drivers WD0 to WDn in thenegative Y axis direction are driven to input/output data of the even-thlayers CA1, CA3, CA5, . . . , CAn−1, and the first line drivers WD0 toWDn in the positive Y axis direction are driven to input/output data ofthe odd-th layers CA0, CA2, CA4, . . . , CAn.

FIG. 11D schematically shows the connection structure of first linesshown in FIG. 11C by using the first line driver WD0 in the negative Yaxis direction and the positive Y axis direction.

FIG. 11E is a structural diagram of another modified example of FIG.11A. In FIG. 11E, one first line driver (e.g., WD0) disposed in thenegative Y axis direction and the positive Y axis direction is shown,and an access signal of the first line driver WD0 is delivered to thelayers CA0 to CAn. Although not shown, the access signal from the firstline driver WD0 is delivered to individual first lines (e.g., WL00 toWLn0) of the layers CA0 to CAn.

FIG. 11E shows an example in which the arrangement of lines fordelivering an access signal is different from FIG. 11C even though anaccess signal delivery path is the same as in FIG. 11C. The first linedriver WD0 in the negative Y axis direction is connected to partiallayers (e.g., CA1, CA3, CA5, . . . ) in another direction (positive Yaxis direction). Also, the first line driver WD0 in the positive Y axisdirection is connected to partial layers (e.g., CA0, CA2, CA4, . . . )in the another direction (negative Y axis direction).

Accordingly, when data of the even-th layers (e.g., CA1, CA3, CA5, . . .) is input/output, the first line driver WD0 in the negative Y axisdirection is driven. In this case, since an access signal is deliveredto the even-th layers (e.g., CA1, CA3, CA5, . . . ) in reverse order,skew according to a data input/output time delay can be reduced asdescribed above. On the other hand, when data of the odd-th layers(e.g., CA0, CA2, CA4, . . . ) is input/output, the first line driver WD0in the positive Y axis direction is driven. Likewise, an access signalis delivered to the odd-th layers (e.g., CA0, CA2, CA4, . . . ) inreverse order.

Although first line drivers disposed in any one direction control layers(e.g., odd-th layers) with a predetermined interval therebetween inFIGS. 11A to 11E, the present inventive concept is not limited thereto.For example, the first line drivers WD0 to WDn disposed in any one side(e.g., in the positive Y axis direction) may control first to (n−m)thlayers CA0 to CAn−m−1, and the first line drivers WD0 to WDn disposed inthe other side (e.g., in the negative Y axis direction) may control(n−m+1)th to (n+1)th layers CAn−m to CAn.

FIGS. 12A and 12B are circuit diagrams of examples in which first linedrivers WD0 to WDn are alternately disposed in both sides of layers inthe Y axis direction. For example, the even-th first line drivers (WD1,WD3, WD5, . . . ) are disposed in the negative Y axis direction, and theodd-th first line drivers (WD0, WD2, WD4, . . . ) are disposed in thepositive Y axis direction.

The even-th first line drivers (WD1, WD3, WD5, . . . ) are connected tothe layers CA0 to CAn in the positive Y axis direction, and the odd-thfirst line drivers (WD0, WD2, WD4, . . . ) are connected to the layersCA0 to CAn in the negative Y axis direction.

Even-th first lines (e.g., WL01, WL03, WL05, . . . of CA0) of each ofthe layers CA0 to CAn are connected to the first line drivers (WD1, WD3,WD5, . . . ) in the negative Y axis direction, and odd-th first lines(e.g., WL00, WL02, WL04, . . . of CA0) of each of the layers CA0 to CAnare connected to the first line drivers (WD0, WD2, WD4, . . . ) in thepositive Y axis direction. An access signal from a first line driver,e.g. WD1, in the negative Y axis direction is delivered to first lines(e.g., WL01 to WLn1) of the layers CA0 to CAn through an extended firstline (e.g., W1). In particular, the access signal from the first linedriver WD1 is sequentially delivered in a direction from the uppermostlayer CAn to the lowest layer CA0.

Similarly, an access signal from a first line driver, e.g. WD0, in thepositive Y axis direction, is sequentially delivered through an extendedfirst line (e.g., W0) in a direction from the uppermost layer CAn to thelowest layer CA0.

FIG. 12B has a similar structure to FIG. 12A. However, in the case ofFIG. 12B, the first line drivers (WD1, WD3, WD5, . . . ) in the negativeY axis direction are connected to the layers CA0 to CAn in the samedirection as the negative Y axis direction and deliver an access signalto even-th first lines (e.g., WL01, WL03, WL05, . . . of CA0).

In addition, the first line drivers (WD0, WD2, WD4, . . . ) in thepositive Y axis direction are connected to the layers CA0 to CAn in thesame direction (e.g., the positive Y axis direction) and deliver anaccess signal to odd-th first lines (e.g., WL00, WL02, . . . of CA0).

Although odd-th and even-th first line drivers are separated in FIGS.12A and 12B, the first line drivers WD0 to WDn may be disposed bygrouping the first line drivers WD0 to WDn in another method.

In addition, although the first line drivers WD0 to WDn are connected tothe layers CA0 to CAn in the negative Y axis direction and the positiveY axis direction in FIGS. 12A and 12B, the present inventive concept isnot limited thereto, and the first line drivers WD0 to WDn may bedisposed in various directions according to a layout and connected tothe layers CA0 to CAn.

In the examples of FIGS. 11A to 12B, whether adjacent top and bottomlayers (e.g., CA0 and CA1) share the second lines BL00 to BLnn has notbeen discussed. However, when adjacent top and bottom layers (e.g., CA0and CA1) share the second lines BL00 to BLnn, the adjacent top andbottom layers may act as a leakage path between each other, so amodified structure may be necessary.

FIG. 13 is a schematic diagram of an example in which adjacent top andbottom layers share second lines.

Referring to FIG. 13, 8 layers CA0 to CA7 are stacked, second lines BL0to BL7 for data input/output are disposed in the layers CA0 to CA7, andadjacent top and bottom layers (e.g., CA0 and CA1, CA2 and CA3, CA4 andCA5, and CA6 and CA7) share the second lines BL0 to BL7.

In the case of a memory cell stacked structure of the layers CA0 to CA7,although not shown, each of the layers CA0 to CA7 may further include afirst line for cell access and a cell for storing data.

Since the layers CA0 and CA1, CA2 and CA3, CA4 and CA5, and CA6 and CA7share the second lines BL0 to BL3, the structure of the shared-secondline may result in a current leakage during inputting/outputting of dataor inputting/outputting of data of one layer may be affected by anadjacent layer. In this case, first line drivers WD1 a and WD1 b aredivided into two pairs and controlled. For example, the first linedrivers WD1 a and WD1 b may be disposed in the negative Y axis directionand the positive Y axis direction.

When data is input to or output from cells of the first layer CA0 andthe second layer CA1 or the fifth layer CA4 and the sixth layer CA5,i.e., generally corresponding cells of a (4n+1)th layer CA4 n and a(4n+2)th layer CA4 n+1 (where n is a natural number including 0), firstlines (not shown) are accessed through the first line drivers WD1 a andWD1 b located in the positive Y axis direction, and the data is input oroutput through corresponding second lines BL0 and BL2.

When data is input to or output from cells of the third layer CA2 andthe fourth layer CA3 or the seventh layer CA6 and the eighth layer CA7,i.e., generally corresponding cells of a (4n+3)th layer CA4 n+2 and a4(n+1)th layer CA4 n+3, first lines (not shown) are accessed through thefirst line drivers WD1 a and WD1 b located in the negative Y axisdirection, and the data is input or output through corresponding secondlines BL1 and BL3.

Although adjacent top and bottom layers share second lines in FIG. 13,more layers may share second lines, and in this case, more pairs offirst line drivers may be disposed.

FIG. 14 is a cross sectional diagram for schematically showing arelationship between two adjacent top and bottom layers.

Referring to portion (a) of FIG. 14, second lines BL00 to BL 13 areseparated for two adjacent top and bottom layers CA0 and CA1. Here, amemory having a 3D stacked structure is illustrated, wherein a pluralityof memory cells C00 to C13, first lines WL00 and WL10 for controlling anaccess to the plurality of memory cells C00 to C13, and the second linesBL00 to BL13 for inputting/outputting data are disposed.

Referring to portion (b) of FIG. 14, the adjacent top and bottom layersCA0 and CA1 share the second lines BL00 to BL03. In addition, theplurality of memory cells C00 to C13, the first lines WL00 and WL10 forcontrolling an access to the plurality of memory cells C00 to C13, andthe second lines BL00 to BL03 for inputting/outputting data aredisposed.

If a plurality of layers are stacked, first lines, second lines, andfirst line drivers may be added according to the increase of the numberof stacks. However, this may result in design limits in a layout. As asolution, layers having similar access timings may be grouped andcontrolled.

FIG. 15 is a block diagram for describing an example of controlling skewby grouping access timings of layers.

Referring to FIG. 15, a semiconductor device 10 includes a firstsemiconductor area G0 to G3 including 16 layers CA0 to CA15 having astacked structure. In addition, a second semiconductor area 12 forinterfacing is disposed below a first layer CA0.

Since a configuration of the second semiconductor area 12 is similar tothat of FIG. 3 and associated reference numerals may be the same, adetailed description thereof will be omitted here.

A total of 4 groups are designated by grouping 4 layers (CA0 to CA3, CA4to CA7, CA8 to CA11, and CA12 to CA15) having similar data input/outputtime delays as one group. This grouping may be performed by making thenumber of layers the same or different for each group according to agiven condition.

A first group G0 having the largest time delay due to the physicaldistance from the second semiconductor area 12 is comprised of theuppermost 4 layers CA12 to CA15. A second group G1 is disposed below thefirst group G0, and a time delay of the second group G1 is smaller thanthe first group G0.

A third group G2 is disposed below the second group G1, and a time delayof the third group G2 is smaller than the second group G1. A fourthgroup G3 is disposed below the third group G2, and a time delay of thefourth group G3 is the smallest in the entire groups G0 to G3.

First lines WL0 to WL15 in the same position (the same X and Yaddresses) are controlled through first line drivers WD00 to WD30 sharedby the groups G0 to G3. In this case, the first line drivers WD00 toWD30 are commonly connected to each of the groups G0 to G3 throughextended first lines W00 to W30.

When access timing control is performed for each group, the extendedfirst lines W00 to W30 may be used as described above and/or may not beused. That is, since access timing control can be performed for eachgroup, the extended first lines W00 to W30 may not be used.

Besides the timing control for each of the groups G0 to G3, since aminute difference may occur between data input/output time delays ineach group, fine control for the extended first lines W00 to W30 may befurther performed.

This timing control for each of the groups G0 to G3 is applicable to notonly the embodiments described above, e.g., a structure sharing orseparating first lines and/or second lines, but also an embodiment inwhich at least one pair of first line drivers WD0 to WD 3 are disposedin both sides of the layers.

Alternatively, skew may be compensated for by controlling a layout in acontrol unit without performing the timing control for each of thegroups G0 to G3. For example, this can be achieved by designing a lengthof a layout connected to a layer having the largest delay time to be theshortest and an opposite case to be the longest.

FIG. 16 is a side perspective view for schematically showing anapplication example of a 3D semiconductor device 10 stacked using athrough-silicon via (TSV) 14.

Although a DRAM memory cell array is illustrated in FIG. 16, embodimentsdescribed herein are applicable to a stacked structure and/or a combinedstructure of a volatile or nonvolatile memory, such as an SRAM, an RRAM,a PRAM, and/or an MRAM.

A memory area of the semiconductor device 10 is comprised of, forexample, 4 stacked layers CA0 to CA3 connected through the TSV 14. Here,each of the layers CA0 to CA3 may be a single wafer, or all of thelayers CA0 to CA3 may be stacked on the same wafer.

The layers CA0 to CA3 share a data line, a control line, and a powerline and are connected to an external control unit or interface unitthrough the TSV 14.

Each of the layers CA0 to CA3 includes first lines WL0 to WL3 (e.g.,wordlines) for accessing a memory cell 13, second lines BL0 to BL3(e.g., bitlines) for inputting or outputting data to or from the memorycell 13, and the memory cell 13 located at a cross point of the firstlines WL0 to WL3 and the second lines BL0 to BL3.

A first line driver WD is disposed in the control unit included in anexternal or the stacked structure. The first line driver WD enables ordisables the corresponding first lines WL0 to WL3 of the respectivelayers CA0 to CA3 by a first line enable signal WE. By sequentiallyenabling the first lines WL0 to WL3 from the first line WL3 located inthe layer CA3 having the latest access timing (or the longest datainput/output time delay) through an extended first line W, skew due toan inter-layer data input/output time delay difference, which occurs dueto a physical position, can be compensated for.

Even in the TSV structure shown in FIG. 16, control using a singleprimary line driver pair and control using grouping of layers can beperformed.

As described above, it has been described through several embodimentsthat skew that occurs due to the physical structure can be compensatedfor through a physical arrangement or a software method for a 3D stackedmemory device. Meanwhile, a verification or test of whether skew hasbeen compensated for is required, so a test and calibration process forskew compensation will now be described.

FIG. 17 is a flowchart of a test and calibration process for skewcompensation of a 3D semiconductor memory device.

Although a read or write operation of a memory device is illustrated inFIG. 17, this test process is applicable not only to a memory device butalso to any semiconductor device having a 3D stacked structure.

Referring to FIG. 17, in operation 171, a read or write command CMD isinput from the outside, e.g., a memory controller, to a memory devicehaving a 3D stacked structure. In operation 172, a wordline enablesignal corresponding to an address of a corresponding cell for whichread or write is going to be performed is activated after apredetermined decoding process is performed.

A read operation will be described herein as an example.

Data of the corresponding cell is output in operation 174 by selectivelycontrolling On/OFF of a bitline selection transistor through a bitlineselection signal CS in operation 173.

As shown in the above-described embodiments, wordlines are sequentiallyactivated from a wordline WLn of a layer far from a controller or aninterface chip. If data of all layers is completely output in operation175, time delays of data output from all of the layers are compared witheach other in operation 176. This time delay operation may be performedby comparing delay amounts between a time of driving a primary line anda time of ending a data delivery through a secondary line of each layer.As an inter-layer time delay difference is small, it is indicated thatskew is reduced.

Here, this time delay comparison may be performed for onlyrepresentative specific layers without performing the test for all ofthe layers.

Optionally, in the time delay comparison, data may be simultaneouslyoutput from a plurality of layers and compared with each other, or timedelays may be sequentially calculated and compared with each other.

As a result of the time delay comparison between layers in operation177, if there is no skew, or if skew is within an acceptable range, thetest process ends.

If skew exceeds the acceptable range, a de-skewing process is furtherperformed in operation 178, and the above-described procedures arerepeated.

The de-skewing process in operation 178 may be performed throughcompensation by a separate delay or an extended layout using anelectrical fuse for each layer in the interface chip or performedthrough CDR or per-pin skew compensation.

Here, the above-described full process of outputting data of all of thelayers may be performed again, or only the procedures of comparing timedelays may be performed again in operation 179.

Although a de-skewing test process is performed by a read or writecommand from the outside in the current embodiment, the processperformed by a command from the outside may also be performed in aseries of operations performed in a system initialization process orperformed by a periodical command from the outside or in a wake-upprocess after power down.

In addition, the de-skewing test and calibration may be periodicallyperformed using a counter included in an interface chip in a structurein which a 3D memory device is a separate chip or is combined with theinterface chip, and the test and calibration may be adaptively performedthrough time delay detection at all times.

FIG. 18 is a block diagram of application examples of the presentinventive concept connected to a memory controller, in which varioustypes of memory bus protocols are disclosed.

Referring to portion (a) of FIG. 18, a bus protocol between a memorycontroller and a memory, e.g., DRAM, is disclosed. A control signal C/S,such as /CS, CKE, /RAS, /CAS, or /WE, and an address signal ADDR areprovided from the memory controller to the memory. Data DQ istransmitted in both directions.

Referring to portion (b) of FIG. 18, packetized control and addresssignals C/A packet are provided from a memory controller to a memory,and data DQ is transmitted in both directions.

Referring to portion (c) of FIG. 18, packetized control, address, andwrite data signals C/A/WD packet are provided from a memory controllerto a memory, and data D is transmitted from the memory to the memorycontroller in one direction.

Referring to portion (d) of FIG. 18, a control signal C/S is providedfrom a memory controller to a memory, e.g., flash SRAM, and a command,an address, and data C/A/DQ are transmitted in both directions.

FIG. 19 is a block diagram of an application example of an electronicsystem including a semiconductor memory device having a 3D stackedstructure according to some embodiments of the inventive concept.

Referring to FIG. 19, the electronic system includes an input device191, an output device 192, a memory device 194, and a processor device193.

The memory device 194 includes an interface chip and/or a memorycontroller and a memory 195 having a 3D stacked structure. The interfacechip and/or the memory controller may form a 3D stacked structure withthe memory 195.

The processor device 193 controls a general operation by being connectedto the input device 191, the output device 192, and the memory device194 through corresponding interfaces.

FIG. 20 is a block diagram of an application example of a single-chipmicrocomputer including a semiconductor memory device having a 3Dstacked structure.

Referring to FIG. 20, the circuit module type microcomputer includes acentral processing unit (CPU) 209, a memory 208, e.g., RAM, having a 3Dstacked structure, which is used as a work area of the CPU 209, a buscontroller 207, an oscillator 202, a frequency divider 203, a flashmemory 204, a power circuit 205, an input/output port 206, and otherperipheral circuits 201 including a timer counter, which are connectedthrough an internal bus 200.

The CPU 209 includes a command control part (not shown) and an executionpart (not shown), decodes a fetched command through the command controlpart, and performs a processing operation through the execution partaccording to a decoding result.

The flash memory 204 stores various kind of data including, but notlimited to an operation program or data of the CPU 209. The powercircuit 205 generates a high voltage required for erase and writeoperations of the flash memory 204.

The frequency divider 203 provides reference clock signals and otherinternal clock signals by dividing a source frequency provided from theoscillator 202 into a plurality of frequencies.

The internal bus 200 includes an address bus, a data bus, and a controlbus.

The bus controller 207 controls bus access corresponding to the numberof determined cycles in response to an access request from the CPU 209.Here, the number of access cycles is related to a wait state and a buswidth corresponding to an accessed address.

When the microcomputer is mounted on the top of a system, the CPU 209controls the erase and write operations of the flash memory 204. In atest or manufacturing stage of a device, the erase and write operationsof the flash memory 204 can be directly controlled through theinput/output port 206 as an external recording device.

FIGS. 21 and 22 are block diagrams of application examples of a memorycard to which a 3D stacked semiconductor memory device of the presentinventive concept is applied when the 3D stacked semiconductor memorydevice is nonvolatile.

Referring to FIGS. 21 and 22, the memory card includes an interface part210 or 220 for interfacing with the outside, a controller 211 or 221,which includes a buffer memory and controls an operation of the memorycard, and at least one nonvolatile memory 212 or 222 having a 3D stackedstructure.

The nonvolatile memory 212 or 222 includes a structure by which skewbetween stacked layers is compensated for as described above.

The controller 211 or 221 is connected to the interface part 210 or 220through a data bus DATA and an address bus ADDRESS and is also connectedto the nonvolatile memory 212 or 222 through a data bus DATA and anaddress bus ADDRESS.

In the example shown in FIG. 22, the memory card includes an addresstranslation table 224, which corresponds to a logic address input fromthe outside or a physical address of the nonvolatile memory 222, in thecontroller 221, in detail, in the buffer memory 223 of the controller221.

For example, when a write operation is performed, new data is written inan arbitrary physical address to update the address translation table224.

The memory card having the address translation table 224 can select aphysical address for providing a memory array by which a write operationcan be performed.

FIGS. 23 to 25 are cross sectional diagrams of application examples inwhich a semiconductor memory device having a 3D stacked structure isintegrated in various ways according to some embodiments of theinventive concept.

Referring to FIG. 23, a semiconductor memory device having a 3D stackedstructure includes a plurality of layers CA0 to CAn 230, which includememory cells and a master chip 231. Some embodiments provide that theplurality of layers 230 can operate in a slave operation relative to themaster chip 231.

The master chip 231 may include an access line configuration forcompensating for a time delay difference occurring between the layersCA0 to Can 230, which has been described in relation to theabove-described embodiments, and a driver.

The master chip 231 has an input/output circuit for interfacing with theoutside on a surface (hereinafter, a first surface) facing the layersCA0 to Can 230. The master chip 231 may further include the samestructure as each of the layers CA0 to Can 230.

The layers CA0 to CAn 230 are stacked on the first surface of the masterchip 231, and each of the layers CA0 to CAn 230 has a memory core.

The layers CA0 to CAn 230 are electrically connected to the master chip231 through, for example, a first through electrode 233.

The layers CA0 to CAn 230 transmit and receive data and control signalsthrough the first through electrode 233. A substrate 232 is electricallyconnected to the master chip 231.

Also, the layers CA0 to CAn 230 can be connected to the master chip 231and/or the substrate 232 through the first through electrode 233, afirst internal electrode 234, a second through electrode 235, and anexternal terminal 236.

The first internal electrode 234 is disposed on the first surface of themaster chip 231. The second through electrode 235 electrically connectsthe first surface of the master chip 231 to a second surface (anopposite side of the first surface) of the master chip 231. The secondthrough electrode 235 is extended to be electrically connected to theexternal terminal 236, and this extended part is disposed on the secondsurface of the master chip 231.

The master chip 231 is electrically connected to the substrate 232through the external terminal 236 and a second internal electrode 237.Here, the first and second through electrodes 233 and 235 may beimplemented by using a TSV. Some embodiments provide that the first andsecond through electrodes 233 and 235 may be replaced by a micro bumpand/or wiring.

In FIG. 24, detailed descriptions of the same configuration as shown inFIG. 23 will be omitted here. Unlike FIG. 23, in FIG. 24, the masterchip 231 does not have a through electrode. A second internal electrode240 extended from the first internal electrode 234 is electricallyconnected to a third internal electrode 241 that is disposed on thesubstrate 232 through a bonding wire.

In addition, both surfaces of the substrate 232 are electricallyconnected through a second through electrode 242. Further, in FIG. 24,the layers CA0 to CAn 230 can be electrically connected to the masterchip 231 and/or the substrate 232 through the first internal electrode234, the second internal electrode 240, and the bonding wire.

Referring to FIG. 25, the memory cell 230 has a structure in which thefirst through electrode 233 of the structure of FIG. 23 is extended topenetrate the master chip 231.

In addition, an input/output circuit and a memory core of the masterchip 231 faces the substrate 232 unlike in FIG. 24.

Since a first through electrode 250 electrically connecting the masterchip 231 to the layers CA0 to Can 230 penetrates the master chip 231 tothe second surface of the master chip 231, which faces the substrate232, a semiconductor device having the 3D stacked structure shown inFIG. 25 does not require the second through electrode 235 unlike in FIG.23, and the layers CA0 to CAn 230 can be electrically connected to thesubstrate 232 through the first through electrode 250, a first internalelectrode 251, a second internal electrode 252, an external terminal253, and a third internal electrode 254. Thus, a semiconductor devicehaving the 3D stacked structure shown in FIG. 25 can reduce a TSVprocessing stage, thereby reducing manufacturing costs.

As described above, in a semiconductor device having a 3D stackedstructure, a data access and input/output path difference between layersdue to the structure and a timing delay difference due to the dataaccess and input/output path difference can be compensated for withoutany additional separate interconnection.

While the inventive concept has been particularly shown and describedwith reference to exemplary embodiments thereof, it will be understoodthat various changes in form and details may be made therein withoutdeparting from the spirit and scope of the following claims.

What is claimed is:
 1. A semiconductor device having a 3 dimensional(3D) stacked structure, the semiconductor device comprising: a firstsemiconductor area with a stacked structure of a first layer havingfirst data and a second layer having second data; a first line that isoperable to deliver an access signal that provides access to the firstsemiconductor area; and a second line that is operable to output atleast one of the first data and the second data from the firstsemiconductor area, wherein access timings of accessing the first andsecond layers are controlled so that a first time delay from thedelivery of the access signal to the first layer to the output of thefirst data is substantially identical to a second time delay from thedelivery of the access signal to the second layer to the output of thesecond data.
 2. The semiconductor device of claim 1, wherein the accesstimings to access the first and second layers through the first line arecompensated to compensate for an output timing difference of the firstand second data from the first and second layers through the secondline.
 3. The semiconductor device of claim 1, wherein access through thefirst line is first performed for a layer having a late output timing tocompensate for an output timing difference between the first and seconddata due to a difference in physical position of the second linedisposed in correspondence with the first and second layers.
 4. Thesemiconductor device of claim 1, further comprising a secondsemiconductor area that is stacked with the first and second layers,wherein the second semiconductor layer controls the first semiconductorarea and interfaces with a device that is external to the semiconductordevice.
 5. The semiconductor device of claim 4, wherein access throughthe first line is first performed for the first layer having a late dataoutput timing through the second line to the second semiconductor area.6. The semiconductor device of claim 5, wherein the access signal isdelivered in a first direction that is a direction from the secondsemiconductor area towards the first layer, and wherein the accessthrough the first line is performed in a second direction that issubstantially opposite the first direction.
 7. The semiconductor deviceof claim 6, further comprising a third line that is operable to receivethe access signal and to deliver the access signal to the first line ofeach of the first and second layers, wherein the third line comprises: afirst delivery line that is operable to deliver the access signal in thefirst direction; and a second delivery line that is operable tosequentially deliver the access signal delivered in the first directionto the first line of each of the first and second layers in the seconddirection.
 8. The semiconductor device of claim 7, wherein the thirdline is commonly connected to the first and second layers.
 9. Thesemiconductor device of claim 6, further comprising a plurality of thirdlines that are operable to receive the access signal and to deliver theaccess signal to the first line of each of the first and second layers.10. The semiconductor device of claim 9, wherein the plurality of thirdlines are alternately connected to the first and second layers in thesecond direction.
 11. The semiconductor device of claim 4, furthercomprising a plurality of third lines that are operable to receive theaccess signal and to deliver the access signal to the first line,wherein the plurality of third lines are separately disposed incorrespondence with the first and second layers.
 12. The semiconductordevice of claim 1, further comprising N layers (N is an integer) stackedwith the first and second layers, wherein the first semiconductor areacomprises a plurality of groups having different data output timings,each group comprising at least one layer having substantially the samedata output timing.
 13. The semiconductor device of claim 12, whereinaccess through the first line is first performed for a group having thelatest data output timing.